차원 (L*W*H)
customized by customers
After-sales Service Provided
Free spare parts, Field installation, commissioning and training, Field maintenance and repair service, Video technical support, Online support, Engineers available to service machinery overseas
Cacuum chamber material
SUS-304 superior stainless steel
Vacuum chamber size
500-1500mm,H500-1500mm.
Vacuum chamber structure
Vertical single/double door, rear vacuum acquisition system
Ultimate vacuum
8.0x10-4Pa
Power supply
Pulse bias power supply, arc power supply
Control mode
Manual or PLC + touch screen
Cooling system
Water-cooling system/cooling water tower/deep water cooling system
Shelves rotation system
Planetary revolution and rotation, frequency control
Process gas
Mass flow controller (3-4 ways)
